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Proceedings Paper

Waveguide silicon nitride grating coupler
Author(s): Jan Litvik; Ivan Dolnak; Milan Dado
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Paper Abstract

Grating couplers are one of the most used elements for coupling of light between optical fibers and photonic integrated components. Silicon–on–insulator platform provides strong confinement of light and allows high integration. In this work, using simulations we have designed a broadband silicon nitride surface grating coupler. The Fourier–eigenmode expansion and finite difference time domain methods are utilized in design optimization of grating coupler structure. The fully, single etch step grating coupler is based on a standard silicon–on–insulator wafer with 0.55 μm waveguide Si3N4 layer. The optimized structure at 1550 nm wavelength yields a peak coupling efficiency –2.6635 dB (54.16%) with a 1–dB bandwidth up to 80 nm. It is promising way for low-cost fabrication using complementary metal–oxide– semiconductor fabrication process.

Paper Details

Date Published: 23 December 2016
PDF: 6 pages
Proc. SPIE 10142, 20th Slovak-Czech-Polish Optical Conference on Wave and Quantum Aspects of Contemporary Optics, 1014213 (23 December 2016); doi: 10.1117/12.2263183
Show Author Affiliations
Jan Litvik, Univ. of Žilina (Slovakia)
Ivan Dolnak, Univ. of Žilina (Slovakia)
Milan Dado, Univ. of Žilina (Slovakia)


Published in SPIE Proceedings Vol. 10142:
20th Slovak-Czech-Polish Optical Conference on Wave and Quantum Aspects of Contemporary Optics
Jarmila Müllerová; Dagmar Senderáková; Libor Ladányi; Ľubomír Scholtz, Editor(s)

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