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Proceedings Paper

Self-referenced interferometer for form measurement of hollow cylinders
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Paper Abstract

We present a new self-referenced interferometer for the form measurement of hollow cylindrical tubes that provides the accuracy in the micrometer range. It is based on a simple and robust setup where the reference and object waves are represented by the central and peripheral parts, respectively, of the conical wave generated by a single axicon. The inteferogram is characterized by a closed-fringe pattern with a circular carrier which allows for the interference phase demodulation using spatial synchronous detection. The misalignment aberrations are corrected by an iterative computational procedure. The measurement capabilities of the interferometer are experimentally tested for the glass and stainless steel tubes with lengths from 220 mm to 600 mm.

Paper Details

Date Published: 23 December 2016
PDF: 6 pages
Proc. SPIE 10142, 20th Slovak-Czech-Polish Optical Conference on Wave and Quantum Aspects of Contemporary Optics, 101421Y (23 December 2016); doi: 10.1117/12.2262989
Show Author Affiliations
Martin Šarbort, Institute of Scientific Instruments of the CAS, v.v.i. (Czech Republic)
Šimon Řeřucha, Institute of Scientific Instruments of the CAS, v.v.i. (Czech Republic)
Miroslava Holá, Institute of Scientific Instruments of the CAS, v.v.i. (Czech Republic)
Zdeněk Buchta, Institute of Scientific Instruments of the CAS, v.v.i. (Czech Republic)
Josef Lazar, Institute of Scientific Instruments of the CAS, v.v.i. (Czech Republic)


Published in SPIE Proceedings Vol. 10142:
20th Slovak-Czech-Polish Optical Conference on Wave and Quantum Aspects of Contemporary Optics
Jarmila Müllerová; Dagmar Senderáková; Libor Ladányi; Ľubomír Scholtz, Editor(s)

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