Proceedings Paper
Scattering of laser light from a relief surface with finite conductivity| Format | Member Price | Non-Member Price |
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Paper Abstract
We present a Kirchhoff-Beckmann approximation of an algorithm for calculating the angular intensity distribution of the light scattered from a microrelief surface of finite conductivity using the algorithm of a fast Fourier transform. Results of computer-aided simulation enables us to establish both the algorithm feasibility limits and a number of relationships connecting characteristics of the scattered light with the diffraction grating parameters.
Paper Details
Date Published: 3 November 1995
PDF: 6 pages
Proc. SPIE 2648, International Conference on Optical Diagnostics of Materials and Devices for Opto-, Micro-, and Quantum Electronics, (3 November 1995);
Published in SPIE Proceedings Vol. 2648:
International Conference on Optical Diagnostics of Materials and Devices for Opto-, Micro-, and Quantum Electronics
Sergey V. Svechnikov; Mikhail Ya. Valakh, Editor(s)
PDF: 6 pages
Proc. SPIE 2648, International Conference on Optical Diagnostics of Materials and Devices for Opto-, Micro-, and Quantum Electronics, (3 November 1995);
Show Author Affiliations
Victor V. Kotlyar, Image Processing Systems Institute (Russia)
I. A. Pankov, Image Processing Systems Institute (Russia)
I. A. Pankov, Image Processing Systems Institute (Russia)
Oleg Kamilevich Zalyalov, Image Processing Systems Institute (Russia)
Published in SPIE Proceedings Vol. 2648:
International Conference on Optical Diagnostics of Materials and Devices for Opto-, Micro-, and Quantum Electronics
Sergey V. Svechnikov; Mikhail Ya. Valakh, Editor(s)
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