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Proceedings Paper

Optical properties and structure of ion-implanted metal films on crystalline lithium niobate
Author(s): Olegh V. Vakulenko; Vasyl S. Staschuk; Borys M. Roman'uk; Mykola I. Kl'uy
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Paper Abstract

The structure and optical properties of nickel and palladium-films on crystalline lithium niobate were studied with the help of an electron microscope, an infrared spectrometer, and an ellipsometer. The optical properties of two-layer systems: ion-implanted metal film (10 - 50 nm thick) pyroelectric (crystalline lithium niobate 0.2 mm thick with the spontaneous polarization vector perpendicular to the surface) were studied by measuring the reflectivity in the wavelength region of 0.7 - 15 micrometers. The systems were argon-ion-implanted with ion energies from 50 to 500 keV. The absorbed irradiation dose varied from 1015 to 5 (DOT) 1017 ion/cm2. After bombarding the surfaces of the nickel-film-systems, the reflectivity almost has not changed over the entire wavelength range, although certain selectivity disappeared, which was due to agitation of the film-pyroelectric interface. We found a striking implantation effect on palladium films, which consisted in abrupt decrease in the reflectivity and in disappearance of the selectivity in a rather wide spectral region of 1 - 15.1 micrometers. The described effect depends considerably on the energy, absorbed dose, and the film thickness. Electron microscopic and elipsometric studies show that the cause of the described effects lay in different changes in both the structure of the near-surface layers and the state of the palladium and nickel film surfaces.

Paper Details

Date Published: 3 November 1995
PDF: 8 pages
Proc. SPIE 2648, International Conference on Optical Diagnostics of Materials and Devices for Opto-, Micro-, and Quantum Electronics, (3 November 1995); doi: 10.1117/12.226153
Show Author Affiliations
Olegh V. Vakulenko, T. Shevchenko Kiev Univ. (Ukraine)
Vasyl S. Staschuk, T. Shevchenko Kiev Univ. (Ukraine)
Borys M. Roman'uk, Institute of Semiconductor Physics (Ukraine)
Mykola I. Kl'uy, Institute of Semiconductor Physics (Ukraine)

Published in SPIE Proceedings Vol. 2648:
International Conference on Optical Diagnostics of Materials and Devices for Opto-, Micro-, and Quantum Electronics
Sergey V. Svechnikov; Mikhail Ya. Valakh, Editor(s)

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