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Proceedings Paper

Aspheric surface measurement using capacitive probes
Author(s): Xin Tao; Daocheng Yuan; Shaobo Li
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Paper Abstract

With the application of aspheres in optical fields, high precision and high efficiency aspheric surface metrology becomes a hot research topic. We describe a novel method of non-contact measurement of aspheric surface with capacitive probe. Taking an eccentric spherical surface as the object of study, the averaging effect of capacitive probe measurement and the influence of tilting the capacitive probe on the measurement results are investigated. By comparing measurement results from simultaneous measurement of the capacitive probe and contact probe of roundness instrument, this paper indicates the feasibility of using capacitive probes to test aspheric surface and proposes the compensation method of measurement error caused by averaging effect and the tilting of the capacitive probe.

Paper Details

Date Published: 28 February 2017
PDF: 9 pages
Proc. SPIE 10256, Second International Conference on Photonics and Optical Engineering, 102564X (28 February 2017); doi: 10.1117/12.2260661
Show Author Affiliations
Xin Tao, China Academy of Engineering Physics (China)
Daocheng Yuan, Xi’an Jiaotong Univ. (China)
China Academy of Engineering Physics (China)
Shaobo Li, China Academy of Engineering Physics (China)

Published in SPIE Proceedings Vol. 10256:
Second International Conference on Photonics and Optical Engineering
Chunmin Zhang; Anand Asundi, Editor(s)

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