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Proceedings Paper

Advanced fast 3D DSA model development and calibration for design technology co-optimization
Author(s): Kafai Lai; Balint Meliorisz; Thomas Muelders; Ulrich Welling; Hans-Jürgen Stock; Sajan Marokkey; Wolfgang Demmerle; Chi-Chun Liu; Cheng Chi; Jing Guo
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Paper Abstract

Direct Optimization (DO) of a 3D DSA model is a more optimal approach to a DTCO study in terms of accuracy and speed compared to a Cahn Hilliard Equation solver. DO’s shorter run time (10X to 100X faster) and linear scaling makes it scalable to the area required for a DTCO study. However, the lack of temporal data output, as opposed to prior art, requires a new calibration method. The new method involves a specific set of calibration patterns. The calibration pattern’s design is extremely important when temporal data is absent to obtain robust model parameters. A model calibrated to a Hybrid DSA system with a set of device-relevant constructs indicates the effectiveness of using nontemporal data. Preliminary model prediction using programmed defects on chemo-epitaxy shows encouraging results and agree qualitatively well with theoretical predictions from a strong segregation theory.

Paper Details

Date Published: 27 April 2017
PDF: 16 pages
Proc. SPIE 10144, Emerging Patterning Technologies, 101440H (27 April 2017); doi: 10.1117/12.2260379
Show Author Affiliations
Kafai Lai, IBM Thomas J. Watson Research Ctr. (United States)
Balint Meliorisz, Synopsys GmbH (Germany)
Thomas Muelders, Synopsys GmbH (Germany)
Ulrich Welling, Synopsys GmbH (Germany)
Hans-Jürgen Stock, Synopsys GmbH (Germany)
Sajan Marokkey, Synopsys, Inc. (United States)
Wolfgang Demmerle, Synopsys GmbH (Germany)
Chi-Chun Liu, Albany NanoTech (United States)
Cheng Chi, Albany NanoTech (United States)
Jing Guo, Albany NanoTech (United States)

Published in SPIE Proceedings Vol. 10144:
Emerging Patterning Technologies
Christopher Bencher, Editor(s)

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