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Proceedings Paper

Optimization study for fabrication of micro-scale stacked dielectric elastomer actuators
Author(s): Mert Corbaci; Kathleen Lamkin-Kennard; Wayne Walter
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Paper Abstract

Fabrication of micro-scale DEAs could benefit many fields including micro-robots, micro-optical systems besides reducing the driving voltage from kV scale to possibly sub-100V range. In an earlier study, proof of concept fabrication methods for PDMS-based fiber-like micro-sized stacked dielectric elastomer actuators were introduced. This study tried to optimize the fabrication process by investigating the effect of different fabrication approaches and different design geometries on the performance of micro-sized DEAs. Micro-sized DEAs with different geometrical parameters were fabricated. Several fabrication steps were modified and the effectiveness of the new fabrication steps and parameters were investigated.

Paper Details

Date Published: 17 April 2017
PDF: 6 pages
Proc. SPIE 10163, Electroactive Polymer Actuators and Devices (EAPAD) 2017, 101631I (17 April 2017); doi: 10.1117/12.2260086
Show Author Affiliations
Mert Corbaci, Rochester Institute of Technology (United States)
Kathleen Lamkin-Kennard, Rochester Institute of Technology (United States)
Wayne Walter, Rochester Institute of Technology (United States)

Published in SPIE Proceedings Vol. 10163:
Electroactive Polymer Actuators and Devices (EAPAD) 2017
Yoseph Bar-Cohen, Editor(s)

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