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Proceedings Paper

Development of an aerosol PZT actuator for a scanner system
Author(s): Peng-Jyun Chen; Ting-Kai Lin; Wen-Jong Wu; David Schipf; Wei-Chih Wang
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Paper Abstract

Piezo devices made of lead-zirconium-titanate (PZT) are known for driving mechanical device for positioning control and vibration actuation. Here we present a new rapid prototyped PZT actuator for potential 2D scanner application. The proposed 5-μm thick film PZT actuator is made by directly deposited on a thin 100 μm thick stainless steel substrate by using an aerosol deposition (AD) method. The actuator features a stable linear vibration and frequency response. Fabrication results, electrical impedance and mechanical response will be presented and discussed.

Paper Details

Date Published: 5 April 2017
PDF: 8 pages
Proc. SPIE 10170, Health Monitoring of Structural and Biological Systems 2017, 101700V (5 April 2017); doi: 10.1117/12.2259969
Show Author Affiliations
Peng-Jyun Chen, National Tsing Hua Univ. (Taiwan)
Ting-Kai Lin, National Taiwan Univ. (Taiwan)
Wen-Jong Wu, National Taiwan Univ. (Taiwan)
David Schipf, Univ. of Washington (United States)
Wei-Chih Wang, National Tsing Hua Univ. (Taiwan)
Univ. of Washington (United States)
National Taiwan Univ. (Taiwan)

Published in SPIE Proceedings Vol. 10170:
Health Monitoring of Structural and Biological Systems 2017
Tribikram Kundu, Editor(s)

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