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Proceedings Paper

Using design differentiating methods to find suspect design patterns which cause failure
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Paper Abstract

Systematic yield detractors are normally expected to be identified by ATPG test result diagnostics. Different test patterns have been designed to test different functions. Test diagnostics can identify failed functions so that product engineers, based on testing results, can narrow down which block in the design performs this function. However, it is often hard to narrow down to a more specific region in a product.

This paper will present a working flow for using design diffing techniques to extract layout structures and perform a geometry analysis flow combined with testing results to find most probable suspects that may cause noticeable yield loss.

Paper Details

Date Published: 30 March 2017
PDF: 4 pages
Proc. SPIE 10148, Design-Process-Technology Co-optimization for Manufacturability XI, 101481C (30 March 2017); doi: 10.1117/12.2259947
Show Author Affiliations
Yang Shen, Semiconductor Manufacturing International Corp. (China)
Thomas Yang, Semiconductor Manufacturing International Corp. (China)
Yifan Zhang, Cadence Design Systems, Inc. (United States)
Jason Sweis, Cadence Design Systems, Inc. (United States)
Ya-Chieh Lai, Cadence Design Systems, Inc. (United States)

Published in SPIE Proceedings Vol. 10148:
Design-Process-Technology Co-optimization for Manufacturability XI
Luigi Capodieci; Jason P. Cain, Editor(s)

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