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Proceedings Paper

Soft X-ray microscope with nanometer spatial resolution and its applications
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Paper Abstract

A compact size microscope based on nitrogen double stream gas puff target soft X-ray source, which emits radiation in water-window spectral range at the wavelength of λ = 2.88 nm is presented. The microscope employs ellipsoidal grazing incidence condenser mirror for sample illumination and silicon nitride Fresnel zone plate objective for object magnification and imaging. The microscope is capable of capturing water-window images of objects with 60 nm spatial resolution and exposure time as low as a few seconds. Details about the microscopy system as well as some examples of different applications from various fields of science, are presented and discussed.

Paper Details

Date Published: 8 December 2016
PDF: 8 pages
Proc. SPIE 10159, Laser Technology 2016: Progress and Applications of Lasers, 101590W (8 December 2016); doi: 10.1117/12.2259877
Show Author Affiliations
P. W. Wachulak, Military Univ. of Technology (Poland)
A. Torrisi, Military Univ. of Technology (Poland)
A. Bartnik, Military Univ. of Technology (Poland)
L. Wegrzynski, Military Univ. of Technology (Poland)
T. Fok, Military Univ. of Technology (Poland)
Z. Patron, Military Univ. of Technology (Poland)
H. Fiedorowicz, Military Univ. of Technology (Poland)


Published in SPIE Proceedings Vol. 10159:
Laser Technology 2016: Progress and Applications of Lasers
Ryszard S. Romaniuk; Krzysztof Kopczynski; Jan K. Jabczyński; Zygmunt Mierczyk, Editor(s)

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