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Proceedings Paper

Miniaturized accelerometer made with ZnO nanowires
Author(s): Sangho Song; Jeong Woong Kim; Hyun Chan Kim; Youngmin Yun; Jaehwan Kim
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Paper Abstract

Miniaturized accelerometer is required in many applications, such as, robotics, haptic devices, gyroscopes, simulators and mobile devices. ZnO is an essential semiconductor material with wide direct band gap, thermal stability and piezoelectricity. Especially, well aligned ZnO nanowire is appropriate for piezoelectric applications since it can produce high electrical signal under mechanical load. To miniaturize accelerometer, an aligned ZnO nanowire is adopted to implement active piezoelectric layer of the accelerometer and copper is chosen for the head mass. To grow ZnO nanowire on the copper head mass, hydrothermal synthesis is conducted and the effect of ZnO nanowire length on the accelerometer performance is investigated. Refresh hydrothermal synthesis can increase the length of ZnO nanowire. The performance of the fabricated ZnO accelerometers is compared with a commercial accelerometer. Sensitivity and linearity of the fabricated accelerometers are investigated.

Paper Details

Date Published: 17 April 2017
PDF: 4 pages
Proc. SPIE 10167, Nanosensors, Biosensors, Info-Tech Sensors and 3D Systems 2017, 101671U (17 April 2017); doi: 10.1117/12.2259845
Show Author Affiliations
Sangho Song, Inha Univ. (Korea, Republic of)
Jeong Woong Kim, Inha Univ. (Korea, Republic of)
Hyun Chan Kim, Inha Univ. (Korea, Republic of)
Youngmin Yun, Inha Univ. (Korea, Republic of)
Jaehwan Kim, Inha Univ. (Korea, Republic of)

Published in SPIE Proceedings Vol. 10167:
Nanosensors, Biosensors, Info-Tech Sensors and 3D Systems 2017
Vijay K. Varadan, Editor(s)

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