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Proceedings Paper

Estimation of effects of thermal fluctuations in graphoepitaxy DSA of cylinder-forming block copolymers
Author(s): Alec Bowen; Azat Latypov; Todd Bailey
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Paper Abstract

The effects of thermal fluctuations in graphoepitaxy DSA are studied using simulations based on the self-consistent field theory (SCFT) model. The known method of using an external potential field to displace or deform the DSA cylinder is employed to study the dependencies of the fluctuations of the position and the size of the DSA cylinder as a function of the confinement well diameter. An explanation to local minima of these dependencies is proposed. A new and faster method to estimate the effects of fluctuations in DSA based on a family of transformations of SCFT potential fields is described and tested.

Paper Details

Date Published: 27 March 2017
PDF: 9 pages
Proc. SPIE 10146, Advances in Patterning Materials and Processes XXXIV, 1014610 (27 March 2017); doi: 10.1117/12.2258709
Show Author Affiliations
Alec Bowen, GLOBALFOUNDRIES Inc. (United States)
The Univ. of Chicago (United States)
Azat Latypov, GLOBALFOUNDRIES Inc. (United States)
Todd Bailey, GLOBALFOUNDRIES Inc. (United States)

Published in SPIE Proceedings Vol. 10146:
Advances in Patterning Materials and Processes XXXIV
Christoph K. Hohle, Editor(s)

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