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Proceedings Paper

Design space analysis of novel interconnect constructs for 22nm FDX technology
Author(s): Tuhin Guha Neogi; Navneet Jain; Piyush Verma; David Permana; Andrey Lutich; Francois Weishbuch; Deepal Wehella-Gamage; Benoit Francois Claude Ramadout; Gowtham Vangara; Juhan Kim; Thomas Herrmann; Kai Sun; Katherina Babich; David Pritchard; Mahbub Rashed
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Paper Abstract

In this paper, we describe an integrated design space analysis approach consisting of full factorial layout generation, lithography simulations with added proximity effects, and rigorous statistical analysis through monte-carlo simulations which is used in the evaluating interconnects. This agile Design rule development process provides a quick turnaround time to down-select the potential layout configurations that can offer a competitive, robust and reliable design and manufacturing. Further layout and placement optimization is carried out to evaluate intra-cell, inter-cell and cell boundary situations, which are critical for a place and routed block. These interconnects developed using the integrated approach has been the key contributor to give 20-30% higher performance at the same Iddq leakage for 8T libraries compared to Single Diffusion break or Double Diffusion break based 12T libraries in 22FDX Technology.

Paper Details

Date Published: 30 March 2017
PDF: 7 pages
Proc. SPIE 10148, Design-Process-Technology Co-optimization for Manufacturability XI, 101480Z (30 March 2017); doi: 10.1117/12.2258668
Show Author Affiliations
Tuhin Guha Neogi, GLOBALFOUNDRIES Inc. (United States)
Navneet Jain, GLOBALFOUNDRIES Inc. (United States)
Piyush Verma, GLOBALFOUNDRIES Inc. (United States)
David Permana, GLOBALFOUNDRIES Inc. (United States)
Andrey Lutich, GLOBALFOUNDRIES Dresden Module Two, GmbH & Co. KG (Germany)
Francois Weishbuch, GLOBALFOUNDRIES Dresden Module Two, GmbH & Co. KG (Germany)
Deepal Wehella-Gamage, GLOBALFOUNDRIES Inc. (United States)
Benoit Francois Claude Ramadout, GLOBALFOUNDRIES Dresden Module One LLC & Co. KG (Germany)
Gowtham Vangara, GLOBALFOUNDRIES Inc. (United States)
Juhan Kim, GLOBALFOUNDRIES Inc. (United States)
Thomas Herrmann, GLOBALFOUNDRIES Dresden Module One LLC & Co. KG (Germany)
Kai Sun, GLOBALFOUNDRIES Inc. (United States)
Katherina Babich, GLOBALFOUNDRIES Inc. (United States)
David Pritchard, GLOBALFOUNDRIES Inc. (Germany)
Mahbub Rashed, GLOBALFOUNDRIES Inc. (Germany)

Published in SPIE Proceedings Vol. 10148:
Design-Process-Technology Co-optimization for Manufacturability XI
Luigi Capodieci; Jason P. Cain, Editor(s)

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