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Proceedings Paper

Exploration of a low-temperature PEALD technology to trim and smooth 193i photoresist
Author(s): Frederic Lazzarino; Sara Paolillo; Anthony Peter; David De Roest; TaeGeun Seong; Yizhi Wu; Stefan Decoster; Vito Rutigliani; Gian Francesco Lorusso; Vassilios Constantoudis; Sven Van Elshocht; Daniele Piumi; Kathy Barla
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Paper Abstract

In this work, we explore the performances of a low-temperature PEALD technology used to trim/clean/smooth and reshape ArF photoresist lines that could subsequently receive an in-situ spacer deposition required to build up any SAxP grating. Different gas mixtures (O2, N2, H2, Ar and combinations) are evaluated on both blanket and patterned wafers. Trim rate, line profile, surface roughness and chemical modification are characterized using ellipsometry, Fourier transform infrared spectroscopy and atomic force microscopy. The photoresist line roughness is measured from top down SEM imaging and the different contributors to the roughness determined from a Power Spectral Density (PSD) analysis. Few results obtained on EUV photoresist blanket wafers using similar plasma treatments will also be briefly presented.

Paper Details

Date Published: 27 March 2017
PDF: 13 pages
Proc. SPIE 10146, Advances in Patterning Materials and Processes XXXIV, 101460K (27 March 2017); doi: 10.1117/12.2258040
Show Author Affiliations
Frederic Lazzarino, IMEC (Belgium)
Sara Paolillo, IMEC (Belgium)
Anthony Peter, IMEC (Belgium)
David De Roest, ASM Belgium N.V. (Belgium)
TaeGeun Seong, ASM Belgium N.V. (Belgium)
Yizhi Wu, ASM Belgium N.V. (Belgium)
Stefan Decoster, IMEC (Belgium)
Vito Rutigliani, IMEC (Belgium)
Gian Francesco Lorusso, IMEC (Belgium)
Vassilios Constantoudis, National Ctr. for Scientific Research Demokritos (Greece)
Nanometrisis P. C. (Greece)
Sven Van Elshocht, IMEC (Belgium)
Daniele Piumi, IMEC (Belgium)
Kathy Barla, IMEC (Belgium)

Published in SPIE Proceedings Vol. 10146:
Advances in Patterning Materials and Processes XXXIV
Christoph K. Hohle, Editor(s)

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