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Proceedings Paper

Cost effective solution using inverse lithography OPC for DRAM random contact layer
Author(s): Jinhyuck Jun; Jaehee Hwang; Jaeseung Choi; Seyoung Oh; Chanha Park; Hyunjo Yang; Thuc Dam; Munhoe Do; Dong Chan Lee; Guangming Xiao; Jung-Hoe Choi; Kevin Lucas
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Paper Abstract

Many different advanced devices and design layers currently employ double patterning technology (DPT) as a means to overcome lithographic and OPC limitations at low k1 values. Certainly device layers with k1 value below 0.25 require DPT or other pitch splitting methodologies. DPT has also been used to improve patterning of certain device layers with k1 values slightly above 0.25, due to the difficulty of achieving sufficient pattern fidelity with only a single exposure. Unfortunately, this broad adoption of DPT also came with a significant increase in patterning process cost. In this paper, we discuss the development of a single patterning technology process using an integrated Inverse Lithography Technology (ILT) flow for mask synthesis. A single pattering technology flow will reduce the manufacturing cost for a k1 > 0.25 full chip random contact layer in a memory device by replacing the more expensive DPT process with ILT flow, while also maintaining good lithographic production quality and manufacturable OPC/RET production metrics.

This new integrated flow consists of applying ILT to the difficult core region and traditional rule-based assist features (RBAFs) with OPC to the peripheral region of a DRAM contact layer. Comparisons of wafer results between the ILT process and the non-ILT process showed the lithographic benefits of ILT and its ability to enable a robust single patterning process for this low-k1 device layer. Advanced modeling with a negative tone develop (NTD) process achieved the accuracy levels needed for ILT to control feature shapes through dose and focus. Details of these afore mentioned results will be described in the paper.

Paper Details

Date Published: 4 April 2017
PDF: 11 pages
Proc. SPIE 10148, Design-Process-Technology Co-optimization for Manufacturability XI, 1014809 (4 April 2017); doi: 10.1117/12.2257857
Show Author Affiliations
Jinhyuck Jun, SK Hynix Semiconductor Inc. (Korea, Republic of)
Jaehee Hwang, SK Hynix Semiconductor Inc. (Korea, Republic of)
Jaeseung Choi, SK Hynix Semiconductor Inc. (Korea, Republic of)
Seyoung Oh, SK Hynix Semiconductor Inc. (Korea, Republic of)
Chanha Park, SK Hynix Semiconductor Inc. (Korea, Republic of)
Hyunjo Yang, SK Hynix Semiconductor Inc. (Korea, Republic of)
Thuc Dam, Synopsys, Inc. (United States)
Munhoe Do, Synopsys Korea Inc. (Korea, Republic of)
Dong Chan Lee, Synopsys Korea Inc. (Korea, Republic of)
Guangming Xiao, Synopsys, Inc. (United States)
Jung-Hoe Choi, Synopsys Korea Inc. (Korea, Republic of)
Kevin Lucas, Synopsys, Inc. (United States)

Published in SPIE Proceedings Vol. 10148:
Design-Process-Technology Co-optimization for Manufacturability XI
Luigi Capodieci; Jason P. Cain, Editor(s)

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