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Proceedings Paper

Fabrication of 3D electro-thermal micro actuators in silica glass by femtosecond laser wet etch and microsolidics
Author(s): Qichao Li; Chao Shan; Qing Yang; Feng Chen; Hao Bian; Xun Hou
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Paper Abstract

This paper demonstrates a novel electro-thermal micro actuator’s design, fabrication and device tests which combine microfluidic technology and microsolidics process. A three-dimensional solenoid microchannel with high aspect ratio is fabricated inside the silica glass by an improved femtosecond laser wet etch (FLWE) technology, and the diameter of the spiral coil is only 200 μm. Molten alloy (Bi/In/Sn/Pb) with high melting point is injected into the three-dimensional solenoid microchannel inside the silica glass , then it solidifys and forms an electro-thermal micro actuator. The device is capable of achieving precise temperature control and quick response, and can also be easily integrated into MEMS, sensors and ‘lab on a chip’ (LOC) platform inside the fused silica substrate.

Paper Details

Date Published: 28 February 2017
PDF: 7 pages
Proc. SPIE 10256, Second International Conference on Photonics and Optical Engineering, 102563S (28 February 2017); doi: 10.1117/12.2257853
Show Author Affiliations
Qichao Li, Xi'an Jiaotong Univ. (China)
Chao Shan, Xi'an Jiaotong Univ. (China)
Qing Yang, Xi'an Jiaotong Univ. (China)
Feng Chen, Xi'an Jiaotong Univ. (China)
Hao Bian, Xi'an Jiaotong Univ. (China)
Xun Hou, Xi'an Jiaotong Univ. (China)

Published in SPIE Proceedings Vol. 10256:
Second International Conference on Photonics and Optical Engineering
Chunmin Zhang; Anand Asundi, Editor(s)

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