In the last decades, fabrication of microlens array in materials with high-damage threshold has attracted increasing interest, especially in the application of high-power laser. In this paper, we propose an advanced strategy to efficiently fabricate microlens array on the surface of glass using a single-pulsed femtosecond laser wet etch process, which is a combination of high-speed laser scanning and the subsequent chemical etch with HF solution. Based on this method, double-sided microlens array, non-regular arrays consisting of close-packed concave microlens array on one side and regular concave MLA on the other side, were fabricated on the 1cm*1cm glass. Especially over one million microlenses could be acquired within an hour, exhibiting great superiority in practical application. Moreover, the optical properties of the asymmetric double-sided MLA were experimentally characterized, and the experimental results reveal the good light homogenization performance.

Date Published: 28 February 2017
PDF: 6 pages
Proc. SPIE 10256, Second International Conference on Photonics and Optical Engineering, 102563Q (28 February 2017); doi: 10.1117/12.2257841

Published in SPIE Proceedings Vol. 10256:
Second International Conference on Photonics and Optical Engineering
Chunmin Zhang; Anand Asundi, Editor(s)