Share Email Print

Proceedings Paper

Modeling 2D and 3D periodic nanostructuring of materials with ultrafast laser pulses (Conference Presentation)
Author(s): Jean-Philippe Colombier; Anton Rudenko; Emile Bévillon; Hao Zhang; Tatiana E. Itina; Razvan Stoian

Paper Abstract

Generation of periodic arrangements of matter on materials irradiated by laser fields of uniform and isotropic energy distribution is a key issue in controlling laser structuring processes below the diffractive limit. Using three-dimensional finite-difference time-domain methods, we evaluate energy deposition patterns below a material's rough surface [1] and in bulk dielectric materials containing randomly distributed nano-inhomogeneities [2]. We show that both surface and volume patterns can be attributed to spatially ordered electromagnetic solutions of linear and nonlinear Maxwell equations. In particular, simulations revealed that anisotropic energy deposition results from the coherent superposition of the incident and the inhomogeneity-scattered light waves. Transient electronic response is also analyzed by kinetic equations of free electron excitation/relaxation processes for dielectrics and by ab initio calculations for metals. They show that for nonplasmonic metals, ultrafast carrier excitation can drastically affect electronic structures, driving a transient surface plasmonic state with high consequences for optical resonances generation [3]. Comparing condition formations of 2D laser-induced periodic surface structures (LIPSS) and 3D self-organized nanogratings, we will discuss the role of collective scattering of nanoroughness and the feedback-driven growth of the nanostructures.

[1] H. Zhang, J.P. Colombier, C. Li, N. Faure, G. Cheng, and R. Stoian, Physical Review B 92, 174109 (2015).

[2] A. Rudenko, J.P. Colombier, and T.E. Itina, Physical Review B 93 (7), 075427 (2016).

[3] E. Bévillon, J.P. Colombier, V. Recoules, H. Zhang, C. Li and R. Stoian, Physical Review B 93 (16), 165416 (2016).

Paper Details

Date Published: 21 April 2017
PDF: 1 pages
Proc. SPIE 10091, Laser Applications in Microelectronic and Optoelectronic Manufacturing (LAMOM) XXII, 100910P (21 April 2017); doi: 10.1117/12.2257473
Show Author Affiliations
Jean-Philippe Colombier, Lab. Hubert Curien (France)
Anton Rudenko, Lab. Hubert Curien (France)
Emile Bévillon, Lab. Hubert Curien (France)
Hao Zhang, Lab. Hubert Curien (France)
Tatiana E. Itina, Lab. Hubert Curien (France)
Razvan Stoian, Lab. Hubert Curien (France)

Published in SPIE Proceedings Vol. 10091:
Laser Applications in Microelectronic and Optoelectronic Manufacturing (LAMOM) XXII
Beat Neuenschwander; Costas P. Grigoropoulos; Tetsuya Makimura; Gediminas Račiukaitis, Editor(s)

© SPIE. Terms of Use
Back to Top
Sign in to read the full article
Create a free SPIE account to get access to
premium articles and original research
Forgot your username?