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Proceedings Paper

In situ observation of ultrafast laser induced micro nano structures using structured light illumination
Author(s): Alberto Aguilar; Jean-Philippe Colombier; Razvan Stoian; Cyril Mauclair
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Paper Abstract

Ultrafast laser pulses can be used to achieve structuring of surfaces at the micro-nano scale. Under certain irradiation conditions, Laser Induced Periodic Surface Structures (LIPSS) are formed. The LIPSS dimensions range from 100 nm to 2-3 micrometers. The characterization is generally conducted after the laser irradiation by systems such as SEM and/or AFM with a resolution beyond the diffraction limit. In this paper, we use a super resolution microscopy technique based on structured illumination for in-situ observation of the irradiated surface. The LIPSS formation on steel and Si is observed IN-SITU and discussed for a multipulse sequence.

Paper Details

Date Published: 27 March 2017
PDF: 1 pages
Proc. SPIE 10092, Laser-based Micro- and Nanoprocessing XI, 1009220 (27 March 2017); doi: 10.1117/12.2257348
Show Author Affiliations
Alberto Aguilar, Lab. Hubert Curien (France)
Univ. de Lyon (France)
Jean-Philippe Colombier, Lab. Hubert Curien (France)
Razvan Stoian, Lab. Hubert Curien (France)
Cyril Mauclair, Lab. Hubert Curien (France)
GIE Manutech-USD (France)

Published in SPIE Proceedings Vol. 10092:
Laser-based Micro- and Nanoprocessing XI
Udo Klotzbach; Kunihiko Washio; Rainer Kling, Editor(s)

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