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Proceedings Paper

Vibrational spectra and structure of silica gel films spun on c-Si substrates
Author(s): Rui Manuel Almeida; Carlo G. Pantano
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Paper Abstract

A series of silica gel films were spin-coated on single crystal silicon (c-Si) substrates and their structure was characterized by vibrational spectroscopy. The films were either dried at room temperature or partially densified at 450 0C. Fourier transform infrared absorption spectra have been obtained for each film and they are compared to the spectrum of thermal SiO2 films. The gel films (ca. 150 nm thick) show the presence of residual OH groups, but very little molecular water or organic species and the fundamental Si-O-Si vibrations exhibit shifts toward lower frequencies, compared to the thermal oxide. The Si-O-Si antisymmetric stretch near 1070 cm was narrower for the gels and the shoulder on the high frequency side was stronger. The nature of this feature is discussed based also on oblique incidence transmission and reflection-absorption spectra taken with polarized infrared light.

Paper Details

Date Published: 1 November 1990
PDF: 9 pages
Proc. SPIE 1328, Sol-Gel Optics, (1 November 1990); doi: 10.1117/12.22571
Show Author Affiliations
Rui Manuel Almeida, Instituto Superior Tecnico (Portugal)
Carlo G. Pantano, The Pennsylvania State Univ. (United States)

Published in SPIE Proceedings Vol. 1328:
Sol-Gel Optics
John D. Mackenzie; Donald R. Ulrich, Editor(s)

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