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Proceedings Paper

Fabrication of 3D gold/polymer conductive microstructures via direct laser writing (Conference Presentation)
Author(s): Eva Blasco; Jonathan B. Müller; Patrick Müller; Andreas C. Fischer; Christopher Barner-Kowollik; Martin Wegener

Paper Abstract

During the last years there has been significant interest in the fabrication of conductive three-dimensional (3D) structures on the micrometer scale due to their potential applications in microelectronics or emerging fields such as flexible electronics, nanophotonics, and plasmonics. Two-photon direct laser writing (DLW) has been proposed as a potential tool for the fabrication of 3D microstructures in various contexts. The majority of these two-photon processes involve the preparation of insoluble polymeric networks using photopolymerizable photoresins based on acrylate or epoxy groups. Nevertheless, the preparation of conductive 3D microstructures is still very challenging. The aim of the current work has been the preparation of conductive 3D microstructures via DLW by employing a newly developed photoresist. The photoresist consists of acrylate-functionalized poly(ethylene glycol) derivates and HAuCl4 as the gold precursor. By varying the gold content of the photoresist, different structures have been prepared and characterized by SEM and XPS. Conductivity of individual wires between prefabricated macroelectrodes has been measured too. Subsequently, the material has been employed to demonstrate the possibility of true 3D microscale connections.

Paper Details

Date Published: 19 April 2017
PDF: 1 pages
Proc. SPIE 10095, Laser 3D Manufacturing IV, 1009504 (19 April 2017); doi: 10.1117/12.2256873
Show Author Affiliations
Eva Blasco, Karlsruher Institut für Technologie (Germany)
Jonathan B. Müller, Karlsruher Institut für Technologie (Germany)
Patrick Müller, Karlsruher Institut für Technologie (Germany)
Andreas C. Fischer, Karlsruher Institut für Technologie (Germany)
Christopher Barner-Kowollik, Karlsruher Institut für Technologie (Germany)
Martin Wegener, Karlsruher Institut für Technologie (Germany)

Published in SPIE Proceedings Vol. 10095:
Laser 3D Manufacturing IV
Bo Gu; Henry Helvajian; Alberto Piqué; Corey M. Dunsky; Jian Liu, Editor(s)

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