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Proceedings Paper

Selective surface smoothening of 3D micro-optical elements
Author(s): Helmut Schift; Nachiappan Chidambaram; Mirco Altana; Robert Kirchner
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Paper Abstract

We have established a non-contact polishing process for thermoplastic, polymeric microlenses and –prisms with dimensions of up to 50 μm, including sharp convex tips and rims with sub-μm details. The required 3D master structures were fabricated using direct laser-writing lithography with two-photon absorption. Master structures were replicated into poly(methyl methacrylate) through a poly(dimethyl siloxane) intermediate copying step and exposed with 172 nm UV light. Due to the reduction of glass transition temperature in a surface-confined layer, roughness in the range of more than 100 nm could subsequently be smoothed-out to below 10 nm by annealing the surface by heating.

Paper Details

Date Published: 21 March 2017
PDF: 7 pages
Proc. SPIE 10144, Emerging Patterning Technologies, 101440B (21 March 2017); doi: 10.1117/12.2256358
Show Author Affiliations
Helmut Schift, Paul Scherrer Institut (Switzerland)
Nachiappan Chidambaram, Paul Scherrer Institut (Switzerland)
Mirco Altana, Heptagon Oy (Switzerland)
Robert Kirchner, Paul Scherrer Institut (Switzerland)

Published in SPIE Proceedings Vol. 10144:
Emerging Patterning Technologies
Christopher Bencher, Editor(s)

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