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Proceedings Paper

Development of swinging part profilometer for optics
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Paper Abstract

A new surface metrology instrument, the ‘Swinging Part Profilometer’ (SPP), has been developed for in-situ measurement of optics undergoing robot-processing in the ground (non-specular) state. In this paper, we present the hardware-design of the SPP, together with software for hardware-control, data-acquisition and surface-reconstruction. First results on a sample part are presented, compared with interferometric metrology, and error-contributions considered. Notably, during each individual scan of a measurement-cycle, the probe remains fixed. This lends itself to automated probe-deployment by the same robot as performs surface-processing, as probe stability is required on only the time-scale for a single scan.

Paper Details

Date Published: 11 November 2016
PDF: 8 pages
Proc. SPIE 10151, Optics and Measurement International Conference 2016, 101510B (11 November 2016); doi: 10.1117/12.2256295
Show Author Affiliations
Peng Zhang, Univ. of Huddersfield (United Kingdom)
Jie Li, Institute of Optics and Electronics (China)
Guoyu Yu, Univ. of Huddersfield (United Kingdom)
David D. Walker, Univ. of Huddersfield (United Kingdom)
Univ. College London (United Kingdom)
Zeeko Research Ltd. (United Kingdom)

Published in SPIE Proceedings Vol. 10151:
Optics and Measurement International Conference 2016
Jana Kovacicinova, Editor(s)

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