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Proceedings Paper

Nanograting formation in air through plasmonic near-field ablation induced by femtosecond laser pulses
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Paper Abstract

Superimposed multiple shots of low-fluence femtosecond (fs) laser pulses form a periodic nanostructure on solid surfaces through ablation. We have demonstrated that the self-organization process of nanostructuring can be regulated to fabricate a homogeneous nanograting on the target surface in air. A simple two-step ablation process and an ablation technique using interfering fs laser beams were developed to control plasmonic near-fields generated by fs laser pulses. The results have shown the nature of a single spatial standing wave mode of surface plasmon polaritons of which periodically enhanced near-fields ablate the target surface, to fabricate the nanograting on gallium nitride (GaN) and metals such as stainless steel (SUS) and titanium (Ti).

Paper Details

Date Published: 20 February 2017
PDF: 12 pages
Proc. SPIE 10091, Laser Applications in Microelectronic and Optoelectronic Manufacturing (LAMOM) XXII, 100910T (20 February 2017); doi: 10.1117/12.2256115
Show Author Affiliations
Godai Miyaji, Tokyo Univ. of Agriculture and Technology (Japan)
Kyoto Univ. (Japan)
Kenzo Miyazaki, Kyoto Univ. (Japan)

Published in SPIE Proceedings Vol. 10091:
Laser Applications in Microelectronic and Optoelectronic Manufacturing (LAMOM) XXII
Beat Neuenschwander; Costas P. Grigoropoulos; Tetsuya Makimura; Gediminas Račiukaitis, Editor(s)

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