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Proceedings Paper

Concepts for compact mid-IR spectroscopy in photochemistry
Author(s): Phuong-Ha Cu-Nguyen; Ziyu Wang; Hans Zappe
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Paper Abstract

Mid-infrared (IR) spectroscopy, typically 3 to 5 µm, is often the technology of choice to monitor the interaction between and concentration of molecules during photochemical reactions. However, classical mid-IR spectrometers are bulky, complex and expensive, making them unsuitable for use in the miniaturized microreactors increasingly being employed for chemical synthesis. We present here the concept for an ultra-miniaturized mid-IR spectrometer directly integrated onto a chemical microreactor to monitor the chemical reaction. The spectrometer is based on micro-machined Fabry-Perot resonator filters realized using pairs of Bragg mirrors to achieve a high spectral resolution. The fabrication of the optical filters is outlined and the measurement of transmittance spectra in the mid-IR range show a good agreement with theory and are thus promising candidates for a fully integrated system.

Paper Details

Date Published: 4 November 2016
PDF: 7 pages
Proc. SPIE 10025, Advanced Sensor Systems and Applications VII, 100251O (4 November 2016); doi: 10.1117/12.2254455
Show Author Affiliations
Phuong-Ha Cu-Nguyen, Univ. of Freiburg (Germany)
Ziyu Wang, Univ. of Freiburg (Germany)
Hans Zappe, Univ. of Freiburg (Germany)

Published in SPIE Proceedings Vol. 10025:
Advanced Sensor Systems and Applications VII
Tiegen Liu; Shibin Jiang; Rene Landgraf, Editor(s)

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