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Proceedings Paper

Industrial femtosecond lasers for machining of heat-sensitive polymers (Conference Presentation)
Author(s): Frank Hendricks; Benjamin Bernard; Victor V. Matylitsky

Paper Abstract

Heat-sensitive materials, such as polymers, are used increasingly in various industrial sectors such as medical device manufacturing and organic electronics. Medical applications include implantable devices like stents, catheters and wires, which need to be structured and cut with minimum heat damage. Also the flat panel display market moves from LCD displays to organic LED (OLED) solutions, which utilize heat-sensitive polymer substrates. In both areas, the substrates often consist of multilayer stacks with different types of materials, such as metals, dielectric layers and polymers with different physical characteristic. The different thermal behavior and laser absorption properties of the materials used makes these stacks difficult to machine using conventional laser sources.

Femtosecond lasers are an enabling technology for micromachining of these materials since it is possible to machine ultrafine structures with minimum thermal impact and very precise control over material removed. An industrial femtosecond Spirit HE laser system from Spectra-Physics with pulse duration <400 fs, pulse energies of >120 μJ and average output powers of >16 W is an ideal tool for industrial micromachining of a wide range of materials with highest quality and efficiency. The laser offers process flexibility with programmable pulse energy, repetition rate, and pulse width. In this paper, we provide an overview of machining heat-sensitive materials using Spirit HE laser. In particular, we show how the laser parameters (e.g. laser wavelength, pulse duration, applied energy and repetition rate) and the processing strategy (gas assisted single pass cut vs. multi-scan process) influence the efficiency and quality of laser processing.

Paper Details

Date Published: 21 April 2017
PDF: 1 pages
Proc. SPIE 10091, Laser Applications in Microelectronic and Optoelectronic Manufacturing (LAMOM) XXII, 100910Y (21 April 2017); doi: 10.1117/12.2251854
Show Author Affiliations
Frank Hendricks, Spectra-Physics (Austria)
Benjamin Bernard, Spectra-Physics (Austria)
Victor V. Matylitsky, Spectra-Physics (Austria)

Published in SPIE Proceedings Vol. 10091:
Laser Applications in Microelectronic and Optoelectronic Manufacturing (LAMOM) XXII
Beat Neuenschwander; Costas P. Grigoropoulos; Tetsuya Makimura; Gediminas Račiukaitis, Editor(s)

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