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Proceedings Paper

Line-shaped femtosecond laser pulses for large-area machining
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Paper Abstract

Holographic line-shaped femtosecond processing was developed for large-area machining. It can be performed with high throughput in laser cutting, peeling, grooving, and cleaning of materials. We demonstrated the single-shot fabrication of a line structure in a glass surface using a line-shaped pulse generated by a holographic cylindrical lens displayed on a liquid-crystal spatial light modulator, a line-shaped beam deformed three-dimensionally for showing the potential of holographic line-shaped beam processing, laser peeling of an indium tin oxide film, in-process laser cleaning of debris on the surface of a fabricating sample, and laser grooving of stainless steel.

Paper Details

Date Published: 17 February 2017
PDF: 8 pages
Proc. SPIE 10092, Laser-based Micro- and Nanoprocessing XI, 1009212 (17 February 2017); doi: 10.1117/12.2251271
Show Author Affiliations
Satoshi Hasegawa, Utsunomiya Univ. (Japan)
Yoshio Hayasaki, Utsunomiya Univ. (Japan)

Published in SPIE Proceedings Vol. 10092:
Laser-based Micro- and Nanoprocessing XI
Udo Klotzbach; Kunihiko Washio; Rainer Kling, Editor(s)

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