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Proceedings Paper

Polycarbonate resin drilling by longitudinally excited CO2 laser
Author(s): Kazuyuki Uno; Masaya Kato; Tetsuya Akitsu; Takahisa Jitsuno
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Paper Abstract

We developed a longitudinally excited CO2 laser with a long external cavity and investigated the drilling characteristics of polycarbonate resin. The CO2 laser was very simple and consisted of a 45-cm-long alumina ceramic pipe with an inner diameter of 13 mm, a pulse power supply, a step-up transformer, a storage capacitance, and a long external optical cavity with a cavity length of 175 cm and an aperture of 9 mm. The CO2 laser produced a short pulse that had a spike pulse with the width of 282 ns and the energy of 0.45 mJ, a pulse tail with the length of 66.9 μs and the energy of 15.65 mJ, and a good circular beam. In a processing system, a ZnSe focusing lens with the focal length of 50 mm was used and the location of the focal plane was that of the sample surface. In the drilling of polycarbonate resin by the CO2 laser, the drilling characteristics depended on the number of pulses and the fluence was investigated. Clear drilling without carbonization was produced by the irradiation of 50 pulses or less with the fluence of 19 J/cm2 and the irradiation of 100 pulses or less with the fluence of 8 J/cm2. The clear drilling with the deepest depth in this work was 403 μm at the 50 pulses irradiation with the fluence of 19 J/cm2. The number of pulses and the fluence can control thermal influence in the CO2 laser processing of polycarbonate resin.

Paper Details

Date Published: 20 February 2017
PDF: 6 pages
Proc. SPIE 10091, Laser Applications in Microelectronic and Optoelectronic Manufacturing (LAMOM) XXII, 1009115 (20 February 2017); doi: 10.1117/12.2251174
Show Author Affiliations
Kazuyuki Uno, Univ. of Yamanashi (Japan)
Masaya Kato, Univ. of Yamanashi (Japan)
Tetsuya Akitsu, Univ. of Yamanashi (Japan)
Takahisa Jitsuno, Osaka Univ. (Japan)

Published in SPIE Proceedings Vol. 10091:
Laser Applications in Microelectronic and Optoelectronic Manufacturing (LAMOM) XXII
Beat Neuenschwander; Costas P. Grigoropoulos; Tetsuya Makimura; Gediminas Račiukaitis, Editor(s)

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