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Proceedings Paper

Progress in fabrication of waveguide spatial light modulators via femtosecond laser micromachining
Author(s): Nickolaos Savidis; Sundeep Jolly; Bianca Datta; Michael Moebius; Thrasyvoulos Karydis; Eric Mazur; Neil Gershenfeld; V. Michael Bove
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Paper Abstract

We have previously introduced a femtosecond laser micromachining-based scheme for the fabrication of anisotropic waveguides in lithium niobate for use in a guided-wave acousto-optic spatial light modulator. This spatial light modulation scheme is extensible to off-plane waveguide holography via the integration of a Bragg reflection grating. In this paper, we present femtosecond laser-based direct-write approaches for the fabrication of (1) waveguide in-coupling gratings and (2) volume Bragg reflection gratings via permanent refractive index changes within the lithium niobate substrate. In combination with metal surface-acoustic-wave transducers, these direct-write approaches allow for complete fabrication of a functional spatial light modulator via femtosecond laser direct writing.

Paper Details

Date Published: 20 February 2017
PDF: 16 pages
Proc. SPIE 10115, Advanced Fabrication Technologies for Micro/Nano Optics and Photonics X, 101150R (20 February 2017); doi: 10.1117/12.2250596
Show Author Affiliations
Nickolaos Savidis, Massachusetts Institute of Technology (United States)
Sundeep Jolly, Massachusetts Institute of Technology (United States)
Bianca Datta, Massachusetts Institute of Technology (United States)
Michael Moebius, Harvard Univ. (United States)
Thrasyvoulos Karydis, Massachusetts Institute of Technology (United States)
Eric Mazur, Harvard Univ. (United States)
Neil Gershenfeld, Massachusetts Institute of Technology (United States)
V. Michael Bove, Massachusetts Institute of Technology (United States)


Published in SPIE Proceedings Vol. 10115:
Advanced Fabrication Technologies for Micro/Nano Optics and Photonics X
Georg von Freymann; Winston V. Schoenfeld; Raymond C. Rumpf, Editor(s)

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