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Proceedings Paper

Compact optical MEMS accelerometers and temperature sensors
Author(s): Branislav Timotijevic; Yves Petremand; Dara Bayat; Markus Luetzelschwab; Laurent Aebi; Maurizio Tormen
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Paper Abstract

Continuous and accurate monitoring of acceleration and temperature inside large turbo- and hydro-generators is of crucial importance to prevent extremely expensive system damages and false positives. Development of optical, metalfree sensors for such systems has gained a lot of attention due to the fact that they are resistant to typically very strong electromagnetic fields and that they are non-conductive. We present miniature temperature and accelerometer optical sensors using a common silicon MEMS platform. A linear response with a deviation as small as 1% between set and measured accelerations has been obtained in an acceleration range 0-40g. Preliminary tests for temperature sensors indicate a linear response with sensitivity better than 1°C in a range of 20°C to 150°C.

Paper Details

Date Published: 20 February 2017
PDF: 8 pages
Proc. SPIE 10116, MOEMS and Miniaturized Systems XVI, 101160G (20 February 2017); doi: 10.1117/12.2250345
Show Author Affiliations
Branislav Timotijevic, CSEM (Switzerland)
Yves Petremand, CSEM (Switzerland)
Dara Bayat, CSEM (Switzerland)
Markus Luetzelschwab, CSEM (Switzerland)
Laurent Aebi, MC-Monitoring (Switzerland)
Maurizio Tormen, CSEM (Switzerland)

Published in SPIE Proceedings Vol. 10116:
MOEMS and Miniaturized Systems XVI
Wibool Piyawattanametha; Yong-Hwa Park, Editor(s)

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