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Proceedings Paper

3D label-free super-resolution imaging
Author(s): Anton Nolvi; Edward Hæggström; Kim Grundström; Ivan Kassamakov
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Paper Abstract

Scanning white light interferometry (SWLI) is a label free optical 3D imaging modality with a vertical sensitivity of a few Ångströms (Å). However, this optical far-field system, is laterally diffraction limited and resolves only a few hundred nanometers. We overcome this limit with microspheres that each produces a photonic nanojet. Thus sub- 100 nm features can laterally be resolved. To validate the performance of Photonic nanoJet based Interferometry (PJI) we compared it to techniques that provide sub-100 nm lateral resolution; Super-Resolution SWLI, atomic force microscope, and scanning electron microscope. We used a recordable Blu-ray disc as sample. Such a disc features a grooved surface topology with heights in the range of 20 nm and with distinguishable sub-100 nm lateral features that are unresolved by diffraction limited optics. We achieved agreement between all three measurement devices across lateral and vertical dimensions.

Paper Details

Date Published: 20 February 2017
PDF: 7 pages
Proc. SPIE 10110, Photonic Instrumentation Engineering IV, 101100L (20 February 2017); doi: 10.1117/12.2250260
Show Author Affiliations
Anton Nolvi, Univ. of Helsinki (Finland)
Åbo Akademi (Finland)
Edward Hæggström, Univ. of Helsinki (Finland)
Kim Grundström, Kimmy Photonics (Finland)
Ivan Kassamakov, Univ. of Helsinki (Finland)

Published in SPIE Proceedings Vol. 10110:
Photonic Instrumentation Engineering IV
Yakov G. Soskind; Craig Olson, Editor(s)

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