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Proceedings Paper

Polymer planar waveguide broadband differential interferometer
Author(s): T. Herzog; K. Gut; Z. Opilski; P. Kałużyński; G. Adamski
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Paper Abstract

In the paper the planar waveguide based on SU-8 polymer were made on 2μm of silica (SiO2) on silicon (Si) substrates in order to obtain base for broadband interferometer. Analysis and calculation of sensitivity for single mode broadband differential interferometer were performed. Paper presents preliminary tests and analysis of such structures. Dilution of SU-8 solution for obtaining thin layer (below 500 nm) followed by elipsometric measurements is presented.

Paper Details

Date Published: 28 September 2016
PDF: 6 pages
Proc. SPIE 10031, Photonics Applications in Astronomy, Communications, Industry, and High-Energy Physics Experiments 2016, 100311J (28 September 2016); doi: 10.1117/12.2249384
Show Author Affiliations
T. Herzog, Silesian Univ. of Technology (Poland)
K. Gut, Silesian Univ. of Technology (Poland)
Z. Opilski, Silesian Univ. of Technology (Poland)
P. Kałużyński, Silesian Univ. of Technology (Poland)
G. Adamski, Silesian Univ. of Technology (Poland)


Published in SPIE Proceedings Vol. 10031:
Photonics Applications in Astronomy, Communications, Industry, and High-Energy Physics Experiments 2016
Ryszard S. Romaniuk, Editor(s)

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