Proceedings Paper
Defect-free fabrication of nano-disk and nano-wire by fusion of bio-template and neutral beam etching| Format | Member Price | Non-Member Price |
|---|---|---|
| $17.00 | $21.00 |
Paper Abstract
We have developed an innovated fabrication technology of Si, GaAs, and Ge nano-structures, i.e., we called defect-free neutral beam etching. The technology has been successfully applied to prototype the quantum nano-disks and nano-wires with ferritin based bio-templates. SEM observation verifies that the designed structures are prototyped. Photoluminescence measurements demonstrates high optical quality of nano-structures based on the technology.
Paper Details
Date Published: 17 November 2016
PDF: 9 pages
Proc. SPIE 10027, Nanophotonics and Micro/Nano Optics III, 100270Q (17 November 2016); doi: 10.1117/12.2247702
Published in SPIE Proceedings Vol. 10027:
Nanophotonics and Micro/Nano Optics III
Zhiping Zhou; Kazumi Wada, Editor(s)
PDF: 9 pages
Proc. SPIE 10027, Nanophotonics and Micro/Nano Optics III, 100270Q (17 November 2016); doi: 10.1117/12.2247702
Show Author Affiliations
Published in SPIE Proceedings Vol. 10027:
Nanophotonics and Micro/Nano Optics III
Zhiping Zhou; Kazumi Wada, Editor(s)
© SPIE. Terms of Use
