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Proceedings Paper

Defect-free fabrication of nano-disk and nano-wire by fusion of bio-template and neutral beam etching
Author(s): S. Samukawa; Shuichi Noda; Akio Higo; Manabu Yasuda; Kazumi Wada
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Paper Abstract

We have developed an innovated fabrication technology of Si, GaAs, and Ge nano-structures, i.e., we called defect-free neutral beam etching. The technology has been successfully applied to prototype the quantum nano-disks and nano-wires with ferritin based bio-templates. SEM observation verifies that the designed structures are prototyped. Photoluminescence measurements demonstrates high optical quality of nano-structures based on the technology.

Paper Details

Date Published: 17 November 2016
PDF: 9 pages
Proc. SPIE 10027, Nanophotonics and Micro/Nano Optics III, 100270Q (17 November 2016); doi: 10.1117/12.2247702
Show Author Affiliations
S. Samukawa, Tohoku Univ. (Japan)
Shuichi Noda, Tohoku Univ. (Japan)
Akio Higo, Tohoku Univ. (Japan)
Manabu Yasuda, The Univ. of Tokyo (Japan)
Kazumi Wada, The Univ. of Tokyo (Japan)

Published in SPIE Proceedings Vol. 10027:
Nanophotonics and Micro/Nano Optics III
Zhiping Zhou; Kazumi Wada, Editor(s)

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