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Proceedings Paper

Method for the fabrication error calibration of the CGH used in the cylindrical interferometry system
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Paper Abstract

This paper presents a method of absolutely calibrating the fabrication error of the CGH in the cylindrical interferometry system for the measurement of cylindricity error. First, a simulated experimental system is set up in ZEMAX. On one hand, the simulated experimental system has demonstrated the feasibility of the method we proposed. On the other hand, by changing the different positions of the mirror in the simulated experimental system, a misalignment aberration map, consisting of the different interferograms in different positions, is acquired. And it can be acted as a reference for the experimental adjustment in real system. Second, the mathematical polynomial, which describes the relationship between the misalignment aberrations and the possible misalignment errors, is discussed.

Paper Details

Date Published: 19 October 2016
PDF: 13 pages
Proc. SPIE 10155, Optical Measurement Technology and Instrumentation, 101551Z (19 October 2016); doi: 10.1117/12.2246767
Show Author Affiliations
Qingquan Wang, Shanghai Univ. (China)
Yingjie Yu, Shanghai Univ. (China)
Kebing Mou, Shanghai Univ. (China)

Published in SPIE Proceedings Vol. 10155:
Optical Measurement Technology and Instrumentation
Sen Han; JiuBin Tan, Editor(s)

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