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Proceedings Paper

Application of double laser interferometer in the measurement of translational stages' roll characteristics
Author(s): Tao Jin; Lu Shen; Youlong Ke; Wenmei Hou; Aisong Ju; Wei Yang; Jialin Luo
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Paper Abstract

In order to achieve rapid measurement of larger travel translation stages’ roll-angle error in industry and to study the roll characteristics, this paper designs a small roll-angle measurement system based on laser heterodyne interferometry technology, test and researched on the roll characteristics of ball screw linear translation stage to fill the blank of the market. The results show that: during the operation of the ball screw linear translation stage, the workbench’s roll angle changes complexly, its value is not only changing with different positions, but also shows different levels of volatility, what’s more, the volatility varies with the workbench’s work speed . Because of the non uniform stiffness of ball screw, at the end of each movement, the elastic potential energy being stored from the working process should release slowly, and the workbench will cost a certain time to roll fluctuate before it achieves a stable tumbling again.

Paper Details

Date Published: 19 October 2016
PDF: 8 pages
Proc. SPIE 10155, Optical Measurement Technology and Instrumentation, 101551Y (19 October 2016); doi: 10.1117/12.2246765
Show Author Affiliations
Tao Jin, Univ. of Shanghai for Science and Technology (China)
Lu Shen, Univ. of Shanghai for Science and Technology (China)
Youlong Ke, Univ. of Shanghai for Science and Technology (China)
Wenmei Hou, Univ. of Shanghai for Science and Technology (China)
Aisong Ju, Univ. of Shanghai for Science and Technology (China)
Wei Yang, Univ. of Shanghai for Science and Technology (China)
Jialin Luo, Univ. of Shanghai for Science and Technology (China)


Published in SPIE Proceedings Vol. 10155:
Optical Measurement Technology and Instrumentation
Sen Han; JiuBin Tan, Editor(s)

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