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Proceedings Paper

A simple and low cost method to fabricate well controllable silicon nanowires based on electrostatic adsorption of PS nanospheres
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Paper Abstract

We propose a simple and low cost method to fabricate well-controllable and organized silicon nanowire (SiNWs) arrays based on electrostatic adsorption of a monolayer of polystyrene nanospheres on Si substrate. The proposed method has been used to demonstrate the controllability of density of SiNWs avoiding complicated and expensive lithography techniques. The proposed method led to well-organized SiNWs and controlling SiNWs size and density for specific optoelectronic and nanophotonic applications.

Paper Details

Date Published: 31 October 2016
PDF: 8 pages
Proc. SPIE 10019, Optoelectronic Devices and Integration VI, 100190W (31 October 2016); doi: 10.1117/12.2246604
Show Author Affiliations
Salah E. El-Zohary, The Univ. of Tokushima (Japan)
Tanta Univ. (Egypt)
Yusuke Iguchi, The Univ. of Tokushima (Japan)
Toshihiro Okamoto, The Univ. of Tokushima (Japan)
Masanobu Haraguchi, The Univ. of Tokushima (Japan)

Published in SPIE Proceedings Vol. 10019:
Optoelectronic Devices and Integration VI
Xuping Zhang; Baojun Li; Changyuan Yu, Editor(s)

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