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Proceedings Paper

Calibration of angle of incidence of ellipsometer by autocollimator-based method
Author(s): Wende Liu; Chi Chen; Qiming Fan; Chu Chu
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Paper Abstract

Accurate determination of the angle of incidence (AOI) of ellipsometer could improve the reliability of the model analysis, thus relieving possible parameter correlation, eliminating inconsistency which is often encountered by using reference samples of different sources to fit the AOI. In this work, firstly, various commercially available standard reference samples are used to retrieve the AOI and compared with each other, which demonstrates the difficulty to make a best choice. Then, the autocollimator-based method is proposed for the establishment of a metrological ellipsometer and the traceable calibration of the AOI is realized. For practical use, a simplified method which is often empirically employed in aligning optical elements is inspected and the validity and accuracy are verified experimentally. The experimental statistics indicate that, the accuracy (deviation from the “true” value) of the mean AOI could be determined in a worst case to be 0.03°, and by optimizing certain geometric conditions, the accuracy could be improved up to 0.0013° with a precision of 0.005° (standard deviation).

Paper Details

Date Published: 19 October 2016
PDF: 6 pages
Proc. SPIE 10155, Optical Measurement Technology and Instrumentation, 101551J (19 October 2016); doi: 10.1117/12.2246594
Show Author Affiliations
Wende Liu, National Institute of Metrology (China)
Chi Chen, National Institute of Metrology (China)
Qiming Fan, National Institute of Metrology (China)
Chu Chu, National Institute of Metrology (China)

Published in SPIE Proceedings Vol. 10155:
Optical Measurement Technology and Instrumentation
Sen Han; JiuBin Tan, Editor(s)

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