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Proceedings Paper

Optical methods for correction of surface acoustic wave sensors topology
Author(s): Dmitry P. Lukyanov; Sergey Shevchenko; Alexander Kukaev; Daniil Safronov
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Paper Abstract

Nowadays surface acoustic wave sensors are produced using a photolithography method. It is expensive in small series production and do not allow further topology correction, which is important for inertial sensors. In this case, a laser ablation method seems promising. It does not require a photomask and can achieve a good matching of topologies produced on opposite sides of the wafer. Several delay lines were produced using a proposed technique. Its characteristics were explored and discussed.

Paper Details

Date Published: 9 November 2016
PDF: 6 pages
Proc. SPIE 10018, Advanced Laser Processing and Manufacturing, 100180H (9 November 2016); doi: 10.1117/12.2246438
Show Author Affiliations
Dmitry P. Lukyanov, Saint Petersburg Electrotechnical Univ. (Russian Federation)
Sergey Shevchenko, Saint Petersburg Electrotechnical Univ. (Russian Federation)
Alexander Kukaev, Saint Petersburg Electrotechnical Univ. (Russian Federation)
Daniil Safronov, Saint Petersburg Electrotechnical Univ. (Russian Federation)

Published in SPIE Proceedings Vol. 10018:
Advanced Laser Processing and Manufacturing
Minlin Zhong; Jonathan Lawrence; Minghui Hong; Jian Liu, Editor(s)

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