
Proceedings Paper
The study of fast measurement hexahedron verticality error by wavefront interferometerFormat | Member Price | Non-Member Price |
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Paper Abstract
This paper proposes a method to measure hexahedron vertical error based on wavefront interferometer and
collimator. The setup of the measurement system and measurement steps is described. Comparing the vertical
error of the same hexahedral surface adjacent measured by coordinate measurement machine, the validity of the
measurement method is verified. Then not only the verticality error, but also form and shape error data of the
two measured surface can be derived. The verticality error of adjacent surface is measured by the combination
measurement method. Then surface figure error data for the two surfaces is measured by wavefront
interferometer. The form and shape error data of one surface relative to the other can be obtained by added the
verticality error to the surface figure error. This is very important in the part's error correction machining
process. The effectiveness of the processing method has been verified by experiment. This method can achieve
high measurement accuracy of 0.5″ and can be extended to high-precision shape and position errors
measurement for other polyhedral parts.
Paper Details
Date Published: 24 November 2016
PDF: 11 pages
Proc. SPIE 10023, Optical Metrology and Inspection for Industrial Applications IV, 100230C (24 November 2016); doi: 10.1117/12.2246394
Published in SPIE Proceedings Vol. 10023:
Optical Metrology and Inspection for Industrial Applications IV
Sen Han; Toru Yoshizawa; Song Zhang, Editor(s)
PDF: 11 pages
Proc. SPIE 10023, Optical Metrology and Inspection for Industrial Applications IV, 100230C (24 November 2016); doi: 10.1117/12.2246394
Show Author Affiliations
Shijun Peng, Changchun Institute of Optics, Fine Mechanics and Physics (China)
Songtao Gao, Changchun Institute of Optics, Fine Mechanics and Physics (China)
Songtao Gao, Changchun Institute of Optics, Fine Mechanics and Physics (China)
Dongcheng Wu, Changchun Institute of Optics, Fine Mechanics and Physics (China)
Erlong Miao, Changchun Institute of Optics, Fine Mechanics and Physics (China)
Erlong Miao, Changchun Institute of Optics, Fine Mechanics and Physics (China)
Published in SPIE Proceedings Vol. 10023:
Optical Metrology and Inspection for Industrial Applications IV
Sen Han; Toru Yoshizawa; Song Zhang, Editor(s)
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