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Proceedings Paper

Measurement uncertainty evaluation of the three degree of freedom surface encoder
Author(s): Kai Ni; Huanhuan Wang; Xinghui Li; Xiaohao Wang; Xiang Xiao; Qian Zhou
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Paper Abstract

A three-DOF surface encoder can be used to measure the three translational degree of freedom (DOF) displacement of a moving table. A measurement uncertainty of the developed three-DOF surface encoder was systematically investigated to confirm its feasibility on the precision positioning of planar motion stage. An expanded uncertainty of 124.4 nm has been calculated in the measurement results of testing three-axis translational motions over a range of 2.5 μm. Among those error sources, cross-talk errors caused by misalignment existing in experimental setup were identified to be the largest error source.

Paper Details

Date Published: 24 November 2016
PDF: 6 pages
Proc. SPIE 10023, Optical Metrology and Inspection for Industrial Applications IV, 100230Z (24 November 2016); doi: 10.1117/12.2246243
Show Author Affiliations
Kai Ni, Tsinghua Univ. (China)
Huanhuan Wang, Tsinghua Univ. (China)
Xinghui Li, Tsinghua Univ. (China)
Xiaohao Wang, Tsinghua Univ. (China)
Xiang Xiao, Tsinghua Univ. (China)
Qian Zhou, Tsinghua Univ. (China)

Published in SPIE Proceedings Vol. 10023:
Optical Metrology and Inspection for Industrial Applications IV
Sen Han; Toru Yoshizawa; Song Zhang, Editor(s)

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