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Proceedings Paper

Aspheric and free-form surfaces test with non-null sub-aperture stitching
Author(s): Dong Liu; Yuhao Zhou; Jian Bai; Tu Shi; Yibing Shen; Yongying Yang; Lei Zhang
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Paper Abstract

A free-form surface sub-aperture stitching interferometry (FSSI) is proposed for aspheric and free-form surfaces testing. Different from normal annular and circular sub-aperture stitching method, non-null interferometric configuration and irregular sub-apertures are employed to make the best use of the resolved fringes. Meanwhile, a multi-aperture simultaneous reverse optimizing reconstruction (MSROR) process is proposed for full aperture figure error reconstruction. With the multi-configuration model, full aperture figure error would be extracted in form of Zernike polynomials from sub-apertures wavefront data by the MSROR method. This method concurrently accomplishes sub-aperture retrace error and misalignment correction, requiring neither complex mathematical algorithms, nor sub-aperture overlaps. The experiments show that, the aspheric annular sub-aperture stitching accuracy with the proposed FSSI is more than 1/50λ (rms) comparing with the result of ZYGO Verifier Asphere interferometer. The bi-conic surface sector sub-aperture stitching accuracy is about 1/ 50λ (rms) comparing with result of Taylor Hobson contourgraph in longitudinal section contour.

Paper Details

Date Published: 31 October 2016
PDF: 12 pages
Proc. SPIE 10021, Optical Design and Testing VII, 100210N (31 October 2016); doi: 10.1117/12.2246149
Show Author Affiliations
Dong Liu, Zhejiang Univ. (China)
Yuhao Zhou, Zhejiang Univ. (China)
Jian Bai, Zhejiang Univ. (China)
Tu Shi, Zhejiang Univ. (China)
Yibing Shen, Zhejiang Univ. (China)
Yongying Yang, Zhejiang Univ. (China)
Lei Zhang, Zhejiang Univ. (China)

Published in SPIE Proceedings Vol. 10021:
Optical Design and Testing VII
Yongtian Wang; Tina E. Kidger; Kimio Tatsuno, Editor(s)

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