The radius of curvature (ROC) is one of the most important parameters of sphere optic components. In optic fine grinding process, radius of curvature accuracy requires up to 0.1%. We propose a method based on high precision CNC grinding machine, develop ROC online measurement method for fine grinding optics. This rapid method only takes few measurement points based on spiral route path, attaining enough accuracy and reduce the time cost, furthermore, can greatly reduce the repeated installation error. Analyzing the uncertainty sources that affect to the ROC measurement results, calculates the combined standard uncertainty 32.8 micron. Completed comparison experiments with CMM, the standard deviation of the experiment result are about 18 micron that approaches to CMM results.

Date Published: 28 October 2016
PDF: 10 pages
Proc. SPIE 9683, 8th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Advanced Optical Manufacturing Technologies, 96830V (28 October 2016); doi: 10.1117/12.2245876

Published in SPIE Proceedings Vol. 9683:
8th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Advanced Optical Manufacturing Technologies
Wenhan Jiang; Li Yang; Oltmann Riemer; Shengyi Li; Yongjian Wan, Editor(s)