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Proceedings Paper

Gravimetric measurements with use of a cantilever for controlling of electrochemical deposition processes
Author(s): Piotr Prokaryn; Pawel Janus; Jerzy Zajac; Andrzej Sierakowski; Krzysztof Domanski; Piotr Grabiec
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Paper Abstract

In this paper we describe the method for monitoring the progress of electrochemical deposition process. The procedure allows to control the deposition of metals as well as conductive polymers on metallic seed layer. The method is particularly useful to very thin layers (1-10 nm) of deposited medium which mechanical or optical methods are troublesome for. In this method deposit is grown on the target and on the test silicon micro-cantilever with a metal pad. Galvanic deposition on the cantilever causes the change of its mass and consequently the change of its resonance frequency. Changes of the frequency is measured with laser vibro-meter then the layer thicknesses can be estimated basing on the cantilever calibration curve. Applying this method for controlling of gold deposition on platinum seed layer, for improving the properties of the biochemical sensors, is described in this paper.

Paper Details

Date Published: 10 November 2016
PDF: 8 pages
Proc. SPIE 10161, 14th International Conference on Optical and Electronic Sensors, 1016107 (10 November 2016); doi: 10.1117/12.2245041
Show Author Affiliations
Piotr Prokaryn, Institute of Electron Technology (Poland)
Pawel Janus, Institute of Electron Technology (Poland)
Jerzy Zajac, Institute of Electron Technology (Poland)
Andrzej Sierakowski, Institute of Electron Technology (Poland)
Krzysztof Domanski, Institute of Electron Technology (Poland)
Piotr Grabiec, Institute of Electron Technology (Poland)

Published in SPIE Proceedings Vol. 10161:
14th International Conference on Optical and Electronic Sensors
Piotr Jasiński, Editor(s)

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