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Proceedings Paper

Accurate reconstruction in measurement of microstructures using digital holographic microscopy
Author(s): Xiaolei Zhang; Xiangchao Zhang; Hong Xiao; Min Xu
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Paper Abstract

Due to the limitation of traditional interferometry, digital holographic microscopy has attracted intensive attention for its capability of measuring complex shapes. However, speckles are inevitable in the recorded interferometric patterns, thereby polluting the reconstructed surface topographies. In this paper, a phase-shifting interferometer is built to realize the in-axis digital holographic microscopy. The anti-aliasing shift-invariant contourlet transform (ASCT) is used for reconstructing the measured surfaces. By avoiding subsampling in the scale and directional filtering schemes, the problems of frequency aliasing and phase distortion can be effectively solved. Practical experiments show that speckles can be recognized and removed straightforwardly. Therefore the proposed method has excellent performance for reconstructing structured surfaces.

Paper Details

Date Published: 24 November 2016
PDF: 7 pages
Proc. SPIE 10023, Optical Metrology and Inspection for Industrial Applications IV, 100230O (24 November 2016); doi: 10.1117/12.2245027
Show Author Affiliations
Xiaolei Zhang, Fudan Univ. (China)
Xiangchao Zhang, Fudan Univ. (China)
Hong Xiao, China Academy of Engineering Physics (China)
Min Xu, Fudan Univ. (China)

Published in SPIE Proceedings Vol. 10023:
Optical Metrology and Inspection for Industrial Applications IV
Sen Han; Toru Yoshizawa; Song Zhang, Editor(s)

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