In the paper the planar waveguide based on SU-8 polymer were made on different substrates. As polymer layer Gerseltec SU8 GM1040 and Microchem SU8 2000.5 were used. By using Gerseltec SU8 GM1040 we obtained layer with thickness 950 nm which gave us planar waveguide bimodal structure for λ=633nm. By using Microchem SU8 2000.5 we obtained layer thickness 450 nm which gave us single mode waveguide structure for λ=633nm. As substrate we used 2μm of SiO₂ on Si and standard microscope glass (soda-lime glass). Additionally the authors performed measurements for characterization of optical and physical properties of obtained layers. We measured layer thickness by Atomic Force Microscope (AFM) and by ellipsometer. Ellipsometry measurement also gave us refractive indices of waveguide layer and substrate. We also performed measurement of effective refractive index and attenuation of waveguide layers. Additionally we performed SEM measurement for checking layers adhesion.

Date Published: 2 September 2016
PDF: 5 pages
Proc. SPIE 10034, 11th Conference on Integrated Optics: Sensors, Sensing Structures, and Methods, 100340M (2 September 2016); doi: 10.1117/12.2244595

Published in SPIE Proceedings Vol. 10034:
11th Conference on Integrated Optics: Sensors, Sensing Structures, and Methods
Tadeusz Pustelny; Przemyslaw Struk; Pawel Mergo; Jacek Wojtas, Editor(s)