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Proceedings Paper

Thin film two-electrode impedance sensor development and tests
Author(s): Michał Zaborowski; Anna Baraniecka; Jerzy Zając; Krzysztof Domański; Piotr Grabiec
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Paper Abstract

A flexible thin film impedance sensor has been developed. Device manufacturing process and preparation of test wafers are described. Sensors with ring shaped Au electrodes have been fabricated on a polyimide substrate using Si wafer as a temporary substrate. The sensors have been characterized by means of Agilent 4294A analyzer and tested in measurements of impedance of human skin, Si wafers and other materials. Results of indirect measurements of samples covered with dielectric layer (SU-8, glass) confirm advantages of the sensors.

Paper Details

Date Published: 10 November 2016
PDF: 7 pages
Proc. SPIE 10161, 14th International Conference on Optical and Electronic Sensors, 101610Y (10 November 2016); doi: 10.1117/12.2244502
Show Author Affiliations
Michał Zaborowski, Institute of Electron Technology (Poland)
Anna Baraniecka, Institute of Electron Technology (Poland)
Jerzy Zając, Institute of Electron Technology (Poland)
Krzysztof Domański, Institute of Electron Technology (Poland)
Piotr Grabiec, Institute of Electron Technology (Poland)

Published in SPIE Proceedings Vol. 10161:
14th International Conference on Optical and Electronic Sensors
Piotr Jasiński, Editor(s)

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