Paper Abstract
This PDF file contains the front matter associated with SPIE Proceedings Volume 9868, including the Title Page, Copyright information, Table of Contents, Introduction, and Conference Committee listing.
Paper Details
Date Published: 28 September 2016
PDF: 8 pages
Proc. SPIE 9868, Dimensional Optical Metrology and Inspection for Practical Applications V, 986801 (28 September 2016); doi: 10.1117/12.2244097
Published in SPIE Proceedings Vol. 9868:
Dimensional Optical Metrology and Inspection for Practical Applications V
Kevin G. Harding; Song Zhang, Editor(s)
PDF: 8 pages
Proc. SPIE 9868, Dimensional Optical Metrology and Inspection for Practical Applications V, 986801 (28 September 2016); doi: 10.1117/12.2244097
Show Author Affiliations
Published in SPIE Proceedings Vol. 9868:
Dimensional Optical Metrology and Inspection for Practical Applications V
Kevin G. Harding; Song Zhang, Editor(s)
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