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Proceedings Paper

Simulation of out-of-plane displacement measurement using vortex beam: on the base of liquid crystal spatial light modulator
Author(s): Haibin Sun; Ping Sun
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Paper Abstract

In ESPI experiment, object beam and reference beam are always planar light. The plane light can be replaced by vortex beam. Vortex beams can be generated by a reflective liquid crystal spatial light modulator (LC-SLM) which added in the optical path. The generated vortex beam can be used as object light or reference light in out-of-plane displacement measurement. The out-of-plane displacement is simulated and analyzed before and after the object deformation. By phase shifting method and unwrapping, the distribution of phase difference is obtained. The simulation results demonstrate the efficacy of the proposed method for the out-of-plane displacement measurements.

Paper Details

Date Published: 24 November 2016
PDF: 6 pages
Proc. SPIE 10023, Optical Metrology and Inspection for Industrial Applications IV, 100231K (24 November 2016); doi: 10.1117/12.2243954
Show Author Affiliations
Haibin Sun, Shandong Normal Univ. (China)
Taishan Univ. (China)
Ping Sun, Shandong Normal Univ. (China)

Published in SPIE Proceedings Vol. 10023:
Optical Metrology and Inspection for Industrial Applications IV
Sen Han; Toru Yoshizawa; Song Zhang, Editor(s)

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