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Proceedings Paper

Laser-induced damage of F-SiO2 protected fluoride based AR coating on a subsurface-damage-free CaF2 at 193nm
Author(s): Jue Wang; Gerald P. Cox; Michael J. D'Lallo; Steven Vankerkhove; Jean Francois Oudard
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Paper Abstract

Increased laser durability is realized by F-SiO2 protected coatings on CaF2 with subsurface-damage-free surface finishing. Surface reflection loss is reduced by fluoride-based antireflection coatings. The F-SiO2 protective coating approach can be extended to the fluoride-based AR coatings on subsurface-damage-free CaF2 optics. In this contribution, a laser-induced damage test was performed on an F-SiO2 protected fluoride-based AR coating on a subsurface-damage-free (SSD-free) CaF2 window with an ArF laser. Similar laser damage resistance was realized on the protected AR coated optics with more than 9% transmission gain when compared to that of the F-SiO2 coated.

Paper Details

Date Published: 10 December 2016
PDF: 9 pages
Proc. SPIE 10014, Laser-Induced Damage in Optical Materials 2016, 100140A (10 December 2016); doi: 10.1117/12.2243783
Show Author Affiliations
Jue Wang, Corning Advanced Optics (United States)
Gerald P. Cox, Corning Advanced Optics (United States)
Michael J. D'Lallo, Corning Advanced Optics (United States)
Steven Vankerkhove, Corning Advanced Optics (United States)
Jean Francois Oudard, Corning Advanced Optics (United States)


Published in SPIE Proceedings Vol. 10014:
Laser-Induced Damage in Optical Materials 2016
Greg J. Exarhos; Vitaly E. Gruzdev; Joseph A. Menapace; Detlev Ristau; MJ Soileau, Editor(s)

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