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Proceedings Paper

Method to destroy the columnar structure of optical thin films
Author(s): Wei Zhang; Jian-Ying Fan; Heng-qian Zhao; Y. Mu
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Paper Abstract

A method based on continuously modulating the vapor deposition angle, δ, in the range from 0° < δ < 180° at an appropriate rate is proposed, by which the typical colunmar structure of vapordeposited thin films can be prevented in favor of a more compact structure, similar to a bulk material. The growth rates of such films are quantifed, and the their microstructure is simulated by computer. At the same time, an experimental study has been performed successfully. Lastly, the mechanism underlying these improved properties is analyzed and discussed.

Paper Details

Date Published: 1 December 1990
PDF: 6 pages
Proc. SPIE 1324, Modeling of Optical Thin Films II, (1 December 1990); doi: 10.1117/12.22429
Show Author Affiliations
Wei Zhang, Harbin Institute of Technology (China)
Jian-Ying Fan, Harbin Institute of Technology (China)
Heng-qian Zhao, Harbin Institute of Technology (China)
Y. Mu, Harbin Institute of Technology (China)

Published in SPIE Proceedings Vol. 1324:
Modeling of Optical Thin Films II
Michael Ray Jacobson, Editor(s)

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